T4.1.4 - Ceramic Mems Platforms for Metal Oxide Gas Sensors

Compatibility of Sensing Layers with Thick Film Materials

Bibliographic Data

ID13035446
AuthorsAlexey Vasiliev (0000-0002-7416-1638), O Kul, Alexey D Bolshakov (0000-0001-7223-7232), A Bolshakov (0000-0001-5094-4198), A D Mokrushin, A Mokrushin, A V Shaposhnik (0000-0002-1214-2730), A Shaposhnik
Year2025
Pages108-109
Publication date2025-01-01
Open AccessNo
TypeARTICLE
VenueLectures (BOOK_SERIES)
Journal identifiersISSN: 2116-5289 • E-ISSN: 2116-5289
PublisherOpenEdition Journals (PUBLISHER)
DOI10.5162/eurosensors2025/t4.1.4
OpenAlexW4415688441
LanguageEN
Highly citedNo

Tools

Open DOIOpen Access