Synchrotron-Radiation-Supported High-Aspect-Ratio Nanofabrication
Bibliographic Data
| ID | 22305299 |
|---|---|
| Authors | A Chen (0000-0001-9973-7966, Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, Singapore), Alice Xuelian Chen (0000-0003-2363-3970, National University of Singapore), G Liu (0009-0005-9728-594X, Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, Singapore), L K JIAN (0009-0009-4171-2841, Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, Singapore), HERBERT O MOSER (Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603, Singapore) |
| Year | 2007 |
| Volume | 03 |
| Issue | 01 |
| Pages | 79-88 |
| Publication date | 2007-11-01 |
| Peer Reviewed | Yes |
| Open Access | Yes |
| Type | ARTICLE |
| Venue | COSMOS (JOURNAL) |
| Journal identifiers | ISSN: 0219-6077 • E-ISSN: 1793-7051 |
| Publisher | World Scientific Pub Co Pte Lt (PUBLISHER) |
| DOI | 10.1142/s0219607707000220 |
| OpenAlex | W2083824610 |
| Language | EN |
| References cited | 21 |
X-ray lithography with synchrotron radiation is an important nanolithographic tool which has unique advantages in the production of high aspect ratio nanostructures. The optimum synchrotron radiation spectrum for nanometer scale X-ray lithography is normally in the range of 500 eV to 2 keV. In this paper, we present the main methods, equipment, process parameters and preliminary results of nanofabrication by proximity X-ray lithography within the nanomanufacturing program pursued by Singapore Synchrotron Light Source (SSLS). Nanostructures with feature sizes down to 200 nm and an aspect ratio up to 10 have been successfully achieved by this approach
Electron-beam lithography · Fabrication · Lithography · Nanolithography · Nanomanufacturing · Nanometre · Nanotechnology · Next-generation lithography · Optics · Optoelectronics · Physics · Resist · Synchrotron · Synchrotron radiation · X-ray lithography · Advanced Surface Polishing Techniques · Advancements in Photolithography Techniques · Materials Science · Nanofabrication and Lithography Techniques
| Citation velocity | historical |
|---|---|
| Highly cited | No |