D6.1 - Multiplexing interferometers to provide novel capabilities for nanometrology

Bibliographic Data

ID5955809
AuthorsThomas Kissinger (0000-0003-1832-7143, corresponding author)
Year2023
Pages239-240
Publication date2023-01-01
Open AccessNo
TypeARTICLE
VenueLectures (BOOK_SERIES)
Journal identifiersISSN: 2116-5289 • E-ISSN: 2116-5289
PublisherOpenEdition Journals (PUBLISHER)
DOI10.5162/smsi2023/d6.1
OpenAlexW4382022170
LanguageEN

Tools

Open DOIOpen Access