D5.1 - Compressed nano-FTIR Hyperspectral Imaging for Characterizing Defects in Semiconductors

Bibliographic Data

ID5955903
AuthorsBernd Kästner (0000-0002-6575-6621), Clemens Elster (0000-0003-0113-3713), Arne Hoehl (0000-0003-0813-7514), Manuel Marschall (0000-0003-0648-1936), Dario Siebenkotten (0000-0002-5118-7368), Gerd Wübbeler (0000-0002-6871-8903), E Rühl, Sebastian Wood (0000-0002-8574-0475)
Year2023
Pages231-232
Publication date2023-01-01
Open AccessNo
TypeARTICLE
VenueLectures (BOOK_SERIES)
Journal identifiersISSN: 2116-5289 • E-ISSN: 2116-5289
PublisherOpenEdition Journals (PUBLISHER)
DOI10.5162/smsi2023/d5.1
OpenAlexW4382022149
LanguageEN

Tools

Open DOIOpen Access