M3.2.2 - Characterization of Sensor Responses in 1D and 2D Scan Patterns Via AlScN-Based Mems Mirrors

Bibliographic Data

ID7329177
AuthorsJeong-Yeon Hwang (0000-0001-5650-1515), Erdem Yarar (0000-0001-6275-7058), M Shuvho, Guillaume Wille (0000-0001-8460-8213), Fabian Lofink (0009-0003-3517-8466), Shanshan Gu-Stoppel, Md Bengir Ahmed Shuvho (0000-0002-4224-3073)
Year2025
Pages92-93
Publication date2025-01-01
Open AccessNo
TypeARTICLE
VenueLectures (BOOK_SERIES)
Journal identifiersISSN: 2116-5289 • E-ISSN: 2116-5289
PublisherOpenEdition Journals (PUBLISHER)
DOI10.5162/eurosensors2025/m3.2.2
OpenAlexW4415688445
LanguageEN
Highly citedNo

Tools

Open DOIOpen Access