M3.3.3 - Capacitive Excitation of Out-of-Plane Modes in Mems Resonators with a Planar Electrode Design
Bibliographic Data
| ID | 7329325 |
|---|---|
| Authors | Dale L Huber (0000-0001-6872-8469), D Huber, M Gülly, Georg Pfusterschmied (0000-0003-3810-7770), Ulrich Schmid (0000-0001-9831-8583) |
| Year | 2025 |
| Pages | 100-101 |
| Publication date | 2025-01-01 |
| Peer Reviewed | Yes |
| Open Access | No |
| Type | ARTICLE |
| Venue | Lectures (BOOK_SERIES) |
| Journal identifiers | ISSN: 2116-5289 • E-ISSN: 2116-5289 |
| Publisher | OpenEdition Journals (PUBLISHER) |
| DOI | 10.5162/eurosensors2025/m3.3.3 |
| OpenAlex | W4415688450 |
| Language | EN |
| Citation velocity | historical |
|---|---|
| Highly cited | No |