A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts
Bibliographic Data
| ID | 20297490 |
|---|---|
| Authors | Maryam Jalali (0000-0002-9674-0059, University of Minnesota), James J Marti, James Marti (University of Minnesota), Allison Kirchhoff (University of Minnesota), Allison L Kirchhoff, Frances Lawrenz (0000-0002-6317-7992, University of Minnesota), Stephen A Campbell (0000-0002-0702-5134, University of Minnesota) |
| Year | 2012 |
| Volume | 55 |
| Issue | 4 |
| Pages | 517-524 |
| Publication date | 2012-11-01 |
| Open Access | No |
| Type | ARTICLE |
| Venue | IEEE Transactions on Education (JOURNAL) |
| Journal identifiers | ISSN: 0018-9359 • E-ISSN: 1557-9638 |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) (PUBLISHER) |
| DOI | 10.1109/te.2012.2192442 |
| OpenAlex | W1983812846 |
| Language | EN |
| Citations received | 2 |
| References cited | 14 |
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools
Computational lithography · Electrical engineering · Electron-beam lithography · Electronics · Embossing · Engineering drawing · Lithography · Manufacturing engineering · Microcontact printing · Nanotechnology · Next-generation lithography · Optoelectronics · Photolithography · Resist · X-ray lithography · Computer Science · Engineering · Experimental Learning in Engineering · Materials Science · Mechanical Engineering · Nanofabrication and Lithography Techniques · Nanotechnology research and applications
| Citations per year | 0.17 |
|---|---|
| Citation span | 2014 - 2019 (6) |
| Highly cited | No |